GCr15轴承钢表面PIIID处理膜层膜基结合力的研究  

Interfacial Adhesion of GCr15 Bearing Steel and TiN Films Grown by Plasma Immersion Ion Implantation and Deposition

作　　者：王宇航[1] 汤宝寅[1] 王浪平[1] 王晓峰[1] 甘孔银[1] 于永澔[1] 刘洪喜[1] 王松雁[1] 

机构地区：[1]哈尔滨工业大学材料学院现代焊接生产技术国家重点实验室,哈尔滨150001

出　　处：《真空科学与技术学报》2004年第3期233-237,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：采用等离子体浸没离子注入沉积 (PIIID)技术在GCr1 5轴承钢表面形成TiN薄膜 ,并采用划痕法对不同参数条件下膜层的膜基结合力进行了测量。结果发现 :适当的氩离子溅射清洗和加入合适的过渡层可以提高膜基结合力 。TiN films were grown by plasma immersion ion implantation combined with deposition (PIIID) on GCr15 bearing steel substrates.The interfacial adhesion was studied.We found that surface cleaning of the substrate by argon ion sputtering and proper buffer layer may increase the interfacial adhesion.Film growth conditions,such as bias voltage and the ratio between deposition and implantation may also effect the interfacial adhesion to a varying degree.

关 键 词：GCR15 轴承钢 表面处理 等离子体浸没离子注入沉积 PIIID TIN薄膜 结合力 划痕法 

分 类 号：TG174.444[金属学及工艺—金属表面处理]