超低温薄膜压力传感器的研制  

The Development Of The Ultra-Low Temperature Thin Film Pressure Sensor

作　　者：何迎辉[1] 张修如[1] 张舸 

机构地区：[1]中南大学信息科学与工程学院 [2]湖南理工大学计算机系

出　　处：《传感器世界》2004年第9期21-23,共3页Sensor World

摘　　要：本文对薄膜压力传感器的原理、结构、工艺等进行了分析,并介绍了应用离子溅镀、激光调阻等技术研制成的一种小型超低温薄膜压力传感器。这种传感器测量范围宽、精度高、抗振动和抗腐蚀性强,能在-200℃～100℃温度范围内稳定可靠的工作。The operating principle ,structure and technique of thin film pressure sensor are analysed in this paper .A kind of minitype ultra-low temperature thin film pressure sensor based on ion beam sputtering deposition technology and laser regulating resistance technology is introduced. The sensor has the characteristics of wide measuring range, high accuracy, anti-vibration and anti-shock. It also can stably and reliably work at the temperature bound of -200℃～ 100℃.

关 键 词：离子溅镀 薄膜 激光调阻 温度特性 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]