微细电火花加工装置关键技术研究  

STUDY ON KEY TECHNIQUES OF MICRO-EDM EQUIPMENTS

作　　者：张勇[1] 王振龙[1] 李志勇[1] 杨洋[1] 贾宝贤[1] 胡富强[1] 赵万生[1] 

机构地区：[1]哈尔滨工业大学机电学院,哈尔滨150001

出　　处：《机械工程学报》2004年第9期175-179,共5页Journal of Mechanical Engineering

基　　金：国防基础科研资助项目(K1400061102)

摘　　要：围绕微细点火花加工的关键技术,开发出了具有4轴3联动的微细电火花加工装置。阐述了利用该装置实现微细电火花加工的关键技术和实现途径。包括微能脉冲电源的设计实现;通过选择适当的伺服控制策略,解决了伺服机构在小位移进给时所存在的爬行问题:探索了微细电极的在线制作与检测方法,并分析了在线检测方法存在的误差。在该装置上进行了大量的加工试验,试验已加工出最小直径为12μm的微细轴和25μm的微细孔,并实现了具有空间自由曲面的,大小为1 mm×0.3 mm×0.18 mm微脸谱雕塑的加工。The micro-EDM equipments with three linked axes are developed. The key technique and realization approach of micro-EDM using the equipment are also discussed. The micro-energy pulse power source satisfied with versatile demands is designed by the analysis of the realization approach. To solve the crawl problem of servo mechanism at small feed, a suitable control strategy is applied in the equipment. The microelectrode on-line fabrication and measure is studied and the error of on-line measure is also discussed. The micro-shaft with minimum diameter 12 μm and the micro-hole with minimum diameter 25 μm can be machined stably through lots of experiments on the equipment. And a micro-facial sculpture with free space curved surface and size 1 mm × 0.3 mm × 0.18 mm is also machined successfully.

关 键 词：微细电火花加工 微能脉冲电源 伺服控制策略 电极在线制作与检测 微三维结构 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]