一种改进的CVD金刚石膜生长过程原子尺度三维仿真方法  

A MODIFIED METHOD FOR THE THREE-DIMENSIONAL ATOMIC-SCALE SIMULATION OF CVD DIAMOND FILM

作　　者：张禹[1] 刘国权[1] 秦湘阁[1] 

机构地区：[1]北京科技大学,北京100083

出　　处：《中国体视学与图像分析》2002年第4期207-211,共5页Chinese Journal of Stereology and Image Analysis

基　　金：国家自然科学基金(No:59872003);北京科技大学科研专项发展金(No:20010608790)资助项目

摘　　要：蒙特卡洛动力学(Kinetic Monte Carlo-KMC)仿真方法通过结合金刚石膜生长表面的原子结构和形貌特性,以及对CVD金刚石膜生长过程在原子尺度上的三维表征,可以形象描述CVD金刚石薄膜原子尺度生长过程。本文在介绍KMC方法的同时,分析了所存在问题,并对原有KMC方法加以改进,使之更准确地反映CVD金刚石薄膜原子尺度的生长规律。Kinetic Monte Carlo(KMC)method is an appropriate method to describe the CVD diamond films processes on atomic scale, based on a three-dimensional representation of film growth that incorporates the effects of surface atomic structure and morphology. However, there are somelimitations in this method used at present. Therefore, a modified KMC method was proposed by the present authors, which can describe the features of CVD diamond film growth more accurately.

关 键 词：CVD金刚石膜 原子尺度仿真 KMC方法 三维仿真 

分 类 号：TB43[一般工业技术]