不同膜厚WO_3薄膜的电致变色特性研究  

ELECTROCHOROMIC PROPERTIES OF WO_3 FILMS WITH DIFFERENT FILM THICKNESS

作　　者：罗宇强[1] 李筱琳[1] 任豪[1] 毕君[1] 庞振华[1] 

机构地区：[1]广州市光机电工程研究开发中心,广州510635

出　　处：《太阳能学报》2004年第5期647-650,共4页Acta Energiae Solaris Sinica

摘　　要：研究了膜厚对WO3薄膜的电致变色特性的影响。WO3电致变色薄膜采用真空电子束蒸发技术制备,采用光学膜厚极值法和石英晶体振荡法膜厚测量技术监控WO3薄膜的膜厚及其光学特性。对不同光学膜厚的WO3薄膜的初始态、着色态和退色态的光谱特性进行了对比,同时研究了透射比和电流的时间响应特性。The electrochromic characters of WO_(3 )films with different film thickness have been studied. The WO_(3 )electrochromic film was prepared using electron beam evaporation. The thickness and optical characters of WO_(3 )films were controlled by the extremum method of optical film thickness measure technology and the method of crystal oscillation thickness measure technology. The spectrum characters of asdeposited、bleached and colored WO_(3 )films with different film thickness were contrasted, the time response characters of spectral transmittance and current were also studied.

关 键 词：WO3薄膜 膜厚 电致变色 

分 类 号：TK511.4[动力工程及工程热物理—热能工程]