金属中强束流离子注入的温升效应  

EFFECTS OF TEMPERATURE RISE IN METAL DURING HIGH CURRENTION-IMPLANTATION

作　　者：田人和[1] 顾永俶[2] 卢武星[2] 林文廉[2] 张通和[2] 张荟星[2] 

机构地区：[1]北京师范大学低能核物理研究所,副教授北京100875 [2]北京师范大学

出　　处：《金属学报》1993年第3期B136-B142,共7页Acta Metallurgica Sinica

基　　金：国家"863"计划资助项目

摘　　要：根据非线性热传导方程,用有限差分方法计算金属中强束流离子注入的温升效应给出了温升和温度分布曲线,以及样品表面温度与离子能量、剂量率、靶座温度。From solving the nonlinear equation of thermal conduction by using the finitedifference method,the effects of temperature rise in metals during high currention-implantation have been calculated. Curves of temperature rises, curves of profile temper-ature distributions, and dependences of sample surface temperature upon ion energies,doserates, target temperatures, and sample thicknesses are obtained. The processes of temperaturerise in pulsed and scanning ion-implantations are computed as well, and the temperaturefluctuations in them are discussed also.

关 键 词：离子注入 数值计算 碳素钢 工具钢 

分 类 号：TG142.45[一般工业技术—材料科学与工程]