高反膜的镀制实践与探索  

Studies of high precise high-reflective coating

作　　者：严晖[1] 胡焕林[1] 孙嵩泉 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009 [2]普乐(合肥)光技术有限公司,安徽合肥230088

出　　处：《光学仪器》2004年第5期44-47,共4页Optical Instruments

摘　　要：光学薄膜的厚度对光学元件的性能有决定性的影响,因此精确控制膜厚就成为了关键。分析了石英晶体监控法,介绍了IC/5镀膜自动控制仪。利用IC/5镀膜自动控制仪在现有镀膜机组上镀制出了高性能的高反膜。实验表明所镀膜层的光机性能优异,在光通信和激光器领域具有广阔的应用前景。Because the capacity of the optical component lies crucially on the thin film thickness, monitoring the deposition thickness becomes the key to the precise production. In this paper, the method of the quartz crystal monitor are analyzed, and the IC/5 deposition controller is introduced. The IC/5 deposition controller is applied in the existing coating system, and the high precise high-reflective film is made. A series of measurements show that the optical performance and coating quality have been drastically improved and will be widely used in the optical communication and the laser industries.

关 键 词：IC 光通信 激光器 精确控制 石英晶体 光学元件 光学薄膜 高性能 镀膜层 应用前景 

分 类 号：TH74[机械工程—光学工程] TN929[机械工程—仪器科学与技术]