离子束溅射技术制备PtRu纳米合金薄膜载体催化剂材料及其结构表征  

The Configuration of PtRu Nanometer Alloy Membrane Supporting Catalytical Material by IBAD

作　　者：李旸[1] 杨滨[1] 昝林寒[1] 

机构地区：[1]昆明贵金属研究所,云南昆明650221

出　　处：《贵金属》2004年第4期40-44,共5页Precious Metals

基　　金：国家自然科学基金(50001003)

摘　　要：采用离子束溅射技术,Pt和Ru双靶材通过制备工艺条件的设计,制备出含单质Pt、单质Ru及PtRu合金的纳米载体薄膜材料。采用X射线衍射、透射电镜、X射线光电子能谱等分析手段表征了薄膜材料的结构,验证了离子束溅射技术制备Pt合金薄膜的可操作性,并对Pt合金成膜规律进行了初步探索。Pt, Ru and PtRu alloy carrier membrane nanometer materials were prepared by IBAD. The structure and composition of the membrane materials were configurated by using the X-rays diffraction, the transmission electronic microscope and the X-ray photoelectron spectroscopy. It was proved that the technology of IBAD was suitable to prepare PtRu alloy membrane. The grown rules of Pt alloy membrane was discussed.

关 键 词：离子束溅射 结构表征 合金薄膜 单质 等分 X射线光电子能谱 X射线衍射 制备 催化剂 纳米载体 

分 类 号：TG146.45[一般工业技术—材料科学与工程] O484[金属学及工艺—金属材料]