LiNbO_3声表面波特性及其应用  

Surface Acoustic Wave Properties and Applications of Lithium Niobate

作　　者：曹亮亮[1] 叶志镇[1] 王新昌[1] 

机构地区：[1]浙江大学硅材料国家重点实验室,杭州310027

出　　处：《材料导报》2004年第10期79-81,共3页Materials Reports

基　　金：国家自然科学基金重大研究规划(90101009)

摘　　要：LiNbO_3因其优异的压电性能和声表面波特性被广泛应用于声表面波器件中。着重介绍LiNbO_3的压电性能、声表面性能及其薄膜制备技术,对通过不同制备工艺生长出的LiNbO_3薄膜的质量和声表面波性能进行了比较,并简要介绍了LiNbO_3在声表面波领域应用的新进展。LiNbO_3 have many applications in SAW devices due to its excellent piezoelectric and surface acoustic wave properties. This paper pays emphasis on the piezoelectric, surface acoustic wave properties of LiNbO_3 and fabrication processes of its thin film, with comparison of piezoelectric and surface acoustic wave properties of thin films that have grown in different processes. Finally, several novel applications of LiNbO_3 in the field of surface acoustic wave are introduced briefly.

关 键 词：LiNbO3薄膜 声表面波器件 薄膜制备 压电性能 新进展 表面性能 领域 

分 类 号：TB527[理学—物理] TN65[理学—声学]