PDP中Mg_(1-x)Ca_xO复合介质保护膜结晶取向研究  

Study on Preferred Orientation of Mg_(1-x)Ca_xO Films in Plasma Display Panel

作　　者：夏星[1] 郭滨刚[1] 范玉锋[1] 刘纯亮[1] 

机构地区：[1]西安交通大学电子物理与器件研究所,西安710049

出　　处：《真空科学与技术学报》2004年第5期339-342,共4页Chinese Journal of Vacuum Science and Technology

基　　金：教育部科学技术研究重大项目"彩色PDP介质保护膜的制备与工艺优化"资助 (No 0 2 0 5)

摘　　要：为了研究CaO的加入对MgOPDP介质保护膜晶面择优取向的影响 ,使用不同CaO含量的MgO +CaO膜料 ,在不同的基底温度和沉积速率下进行电子束蒸发沉积 ,并对形成的Mg1-xCaxO膜进行了X射线衍射分析。结果表明 ,Ca含量越小 ,越容易形成〈111〉择优取向。在选取的所有基底温度和沉积速率下 ,纯MgO和Mg0 .96Ca0 .0 4O膜都形成了〈111〉晶面择优取向 ;Mg0 .93 Ca0 .0 7O膜 ,获得最强的 (111)衍射峰 ;而Mg0 .9Ca0 .1O膜中 ,在不同的工艺下 ,分别得到 (111) ,(2 0 0 )面以及无序多晶膜。通过X射线衍射分析还发现 ,在Mg1-xCaxO膜中 ,所有〈111〉择优取向的衍射峰 2θ的位置比纯MgO向负方向移动 0 2°～ 0 7° ,而且x越大 ,这种偏移越大。Mg 1-x Ca xO dielectric protective films,used in AC plasma display panel(AC-PDP) and grown by electron beam evaporation of MgO and CaO at different substrate temperatures and deposition rates,were studied with X-ray diffraction(XRD) to understand the influence of the CaO content on the preferential growth orientation.The results show that reduction of CaO content significantly affects the preferential growth orientation of MgO 〈111〉.The 〈111〉 preferential growth orientation was always observed in both pure MgO and Mg 0.96 Ca 0.04 O films grown at all substrate temperature and deposition rates of interest,and the (111) peak of Mg 0.93 Ca 0.07 O is found to be the strongest.However,under varied growth conditions,amorphous Mg 0.9 Ca 0.1 O films and the (111) and (200) preferential orientations can be obtained,respectively.As compared with that of MgO,for all Mg 1-x Ca xO films a shift of 0.2 to 0.7 degree can be observed in the position of the 2θ peak,the larger the x,the wider the shift.

关 键 词：基底温度 X射线衍射分析 结晶取向 复合介质 电子束蒸发沉积 晶面 择优取向 PDP 保护膜 沉积速率 

分 类 号：TB34[一般工业技术—材料科学与工程] O484[理学—固体物理]