压电泵振动模态的有限元分析  

Vibration Mode FEM Analysis of the Piezoelectric Pump

作　　者：朴林华[1] 栾桂冬[2] 张福学[1] 

机构地区：[1]北京信息工程学院传感技术研究中心,北京100101 [2]北京大学电子学系,北京100871

出　　处：《压电与声光》2004年第6期503-505,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金委员会资助项目(60072023);北京市传感器重点实验室资助项目(543046)

摘　　要：采用有限元法,利用ANSYS软件,通过建模、划分网格、加载和求解等途径,计算出压电射流角速度传感器压电泵的前3阶振动模态。结果表明,采用基频作为工作频率最理想,与实测值比较,有限元法计算值相对误差小于6.1%,优于能量法计算值。该方法为压电射流角速度传感器压电泵的优化设计提供了重要的依据。using the finite element method, preceding three vibration models of the piezoelectric pump of the piezoelectric fluidic angular rate sensors has been obtained by a series of procedure, such as model building, meshing,loads applying and equation solving. In the process the ANSYS program is applied. The results show that nature frequency is an ideal operating frequency for the piezoelectric pump and the relative error between the experimental and calculated values by the finite element method was less than 6.1%. This calculated method has a great advantage over the energy method and provides fundamental basis for optimization of the piezoelectric pump.

关 键 词：压电射流角速度传感器 压电泵 有限元法 振动模态 

分 类 号：TN379[电子电信—物理电子学] TN37