新型SAW谐振式微加速度计的设计  

Design of the SAW Accelerometer with Force Open/ Closed Loop Transform

作　　者：刘骏跃[1] 陈明[1] 

机构地区：[1]西北工业大学,陕西西安710072

出　　处：《测控技术》2005年第1期8-10,共3页Measurement & Control Technology

基　　金：航空基金资助项目(01I53071)

摘　　要：提出了一种基于静电力负反馈、并可进行开／闭环切换的新型加速度计,它既能保护石英悬臂梁避免其疲劳或断裂,又能确保加速度计具有一定的测量范围和灵敏度。介绍了该新型加速度计的基本结构和工作原理。分析了电容器中静电力的非线性特征,给出了线性化静电力的实现方案及其控制器设计方法。最后,指出这一新型SAW加速度计的优越性。A new SAW accelerometer based on electrostatic force feedback and open/closed loop transform is put forward theoretically in order to avoid excessive inertia impact having a harmful effect on suspended arm quartz beam. The elementary principle of the new SAW accelerometer and its plan of electrostatic force feedback with open/closed loop transform are discussed in detail. At last, the advantage of the new SAW accelerometer is presented.

关 键 词：微型加速度计 静电力 开/闭环切换 

分 类 号：TH82[机械工程—仪器科学与技术]