VHF-PECVD制备微晶硅材料及电池初步研究  

A PRELIMINARY STUDY ON MICROCRYSTALLINE SILICON MATERIALS AND SOLAR CELLS FABRICATED BY VHF-PECVD

作　　者：张晓丹[1] 朱锋[1] 赵颖[1] 薛俊明[1] 孙建[1] 耿新华[1] 熊绍珍[1] 

机构地区：[1]南开大学光电所,天津300071

出　　处：《太阳能学报》2004年第6期789-793,共5页Acta Energiae Solaris Sinica

基　　金：国家重大基础研究项目(No.G2000028202; G2000028203)教育部重点项目(No.02167)"863"项目(No.2002303261)

摘　　要：研究了用甚高频等离子体增强化学气相沉积(VHF-PECVD)方法制备的不同沉积气压下的微晶硅薄膜样品。随着沉积气压的逐渐增大,样品的沉积速率也逐渐增大;样品的光敏性和激活能测试结果表明:随气压的变化两者发生了规律性一致的变化;傅立叶变换红外(FTIR)测试表明制备的样品中含有一定量的氧,使得样品呈现弱n型;室温微区喇曼光谱测试分析得到样品的微晶化特征与IR的分析是一致的,用高斯函数对喇曼谱解谱分析定量得出了晶化程度;分析了H处理p/I界面对电池性能的影响;首次在国内用VHF-PECVD制备出效率达4.24%的微晶硅电池。Samples deposited at different deposition pressures by VHF-PECVD were studied. The growth rate of samples enhanced with the increasing of deposition pressure. The results of photosensitivity and activation energy shown the same rule with the change of pressure. The measurement results of FTIR indicated that there are certain extent oxygen existed in sample. In addition, the sample demonstrated the evident crystallization through the analysis of FTIR and Raman spectra. The influence of p/i interface treated by hydrogen on the characteristic of solar cells was investigated. An efficiency of 4.24% of microcrystalline silicon solar cell prepared by VHF-PECVD was firstly fabricated in China.

关 键 词：甚高频等离子体增强化学气相沉积 微晶硅薄膜 微晶硅电池 微区喇曼光谱 傅立叶变换红外光谱 

分 类 号：TK514[动力工程及工程热物理—热能工程]