一种新型CO气敏双层薄膜材料  

A new type of double-layer thin film material for co gas sensing

作　　者：刘文利[1] 俞琳[1] 高建华[1] 李蕾[1] 

机构地区：[1]山东大学物理与微电子学院,山东济南250014

出　　处：《中国环境监测》2001年第5期46-48,共3页Environmental Monitoring in China

摘　　要：介绍了一种新型结构 CO气敏的半导体薄膜材料——粉末溅射方法制备的表面层掺杂 Sn O2 /Sn O2 ∶ Pt双层膜的气敏特性。分析了双层膜中的导电层厚度对气敏特性的影响 。The gas sensing characteristics of a new type of semiconductor thin film SnO 2/SnO 2∶Pt double layer thin film were introduced The film was fabricated by powder sputtering using surface-layer doping method The influence of the thickness of the conductance layer on gas sensing properties was investigated The problems related to gas sensing mechanism were discussed

关 键 词：气敏双层薄膜材料 粉末溅射 薄膜 传感器 一氧化碳 半导体 大气监测 监测仪 

分 类 号：X859[环境科学与工程—环境工程]