MEMS与MEMS光开关  

MEMS and MEMS Optical Switch

作　　者：梁宏军[1] 张兴社[2] 

机构地区：[1]西安通信学院数理教研室,陕西西安710106 [2]中国人民解放军陆航局驻西安地区军代室,陕西西安710032

出　　处：《应用光学》2005年第1期60-62,共3页Journal of Applied Optics

摘　　要：微机电系统 (MEMS)技术是一种新型制造技术 ,在光通信的发展中得到广泛的应用 ,有极大的市场价值。在整个光通信中 ,光开关是较为重要的光无源器件 ,在光网络系统中可对光信号进行选择性操作。随着光通信的日益发展 ,对光开关的技术要求也日益提高 ,利用 MEMS技术制作的新型光开关具有体积小、重量轻、能耗低、集成化程度高等特点 ,从而日益成为研究的热点。本文简单介绍了 MEMS技术和其主要特点 ,并较详细地阐述了MEMS技术在光通信中的应用 ,以及 MEMS光开关的结构。MEMS(micro-electro-mechanical system) is a new fabricating technique, Which is widely used in the optical communication and has a great value in the communication market.The optical switch is an important passive device,which can selectively control optical signals in the optical communication of optical network system. The new type of optical switch, which is made with MEMS, has many advantages, such as small size, light weight, low consumption and high integralization. Therefore, the research on the optical switch has become an object which more and more experts are hunting for. In this paper, the MEMS and its main characteristics are briefly introduced, the application of MEMS in the optical communication thoroughly described, and the structure, the trend of development and the main problems of the MEMS optical switch are analyzed respectively.

关 键 词：微机电系统 光开关 光通信 

分 类 号：TN256[电子电信—物理电子学]