BST薄膜铁电移相器研究进展  

Research Progress on Ferroelectric Phase Shifters Using BST Thin Films

作　　者：余慧春[1] 徐爱兰[1] 惠春[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海200030

出　　处：《电子元件与材料》2005年第3期59-62,共4页Electronic Components And Materials

基　　金：国防预研基金资助项目(DJ3.5.1)

摘　　要：钛酸锶钡(BST)薄膜因其具有高的介电调谐量,相对低的损耗tgδ和快的开关速度,在微波移相器的应用中显示出巨大优势。介绍了改善BST薄膜的介电性能的有效方法,衬底材料的选择,以及BST薄膜铁电移相器的结构类型和研究进展。Barium strontium titanate (BST) thin films had been investigated as a potential voltage tunable element for microwave phase shifter applications because of their high tunability, relatively low loss, and fast switching speed. Methods for improving the dielectric properties of BST thin films and the choice of substrates for ferroelectric phase shifters were discussed. The structures and current status of ferroelectric phase shifters using BST thin films were also reviewed.

关 键 词：微波技术 钛酸锶钡薄膜 铁电移相器 综述 介电性能 

分 类 号：TM22[一般工业技术—材料科学与工程] TN623[电气工程—电工理论与新技术]