硬盘用压电厚膜微致动器的制作及有限元分析  

Fabrication and Finite Element Analysis of Piezoelectric Thick-Film Micro-Actuator for Hard Disk Drives

作　　者：荆阳[1] 雒建斌[1] 张学恒[1] 张力[1] 

机构地区：[1]清华大学摩擦学国家重点实验室,北京100084

出　　处：《北京理工大学学报》2004年第12期1045-1048,共4页Transactions of Beijing Institute of Technology

基　　金：国家自然科学基金资助项目(90206022)

摘　　要：设计、制作并分析了一种用于高密度硬盘磁头精确定位的新型压电厚膜微致动器.采用流延技术制备PMN-PZT多层膜元件,使用丝网印刷工艺制作Ag/Pd内电极,并对其进行了有限元建模和仿真.仿真结果表明,当采用4层结构的压电厚膜微致动器时,在外加电压±30V的条件下,可以实现0.9216μm的悬臂自由端位移和19.638kHz的谐振频率.A novel thick-film PMN-PZT micro-actuator used in hard disk drive for precision precise positioning of magnetic head has been designed, analyzed and fabricated. This kind of multi-layer device is made by tape-casting technique, and its inner Ag/Pd electrodes are made in screen-printing process. It is also simulated by finite element method to inspect its driving mechanism. The results show that a quad-layer PMN-PZT element has (0.921 6 μm) tip displacement and high resonance frequency up to (19.638 kHz,) if a ±30 V external voltage applies to it.

关 键 词：硬盘驱动器 流延技术 微致动器 PMN-PZT 压电厚膜 

分 类 号：TH7[机械工程—仪器科学与技术] TN4[机械工程—精密仪器及机械]