金属薄膜加热器的研究  

Research of Metal Membrane Heater

作　　者：闫卫平[1] 朱剑波[1] 马灵芝[1] 杜立群[2] 

机构地区：[1]大连理工大学电子工程系,大连116024 [2]大连理工大学微系统技术研究中心,大连116024

出　　处：《传感技术学报》2004年第4期615-618,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目 (6 0 174 0 34)

摘　　要：采用射频溅射方法制备了Cr和Ni-Cr(Ni:80 % ,Cr :2 0 % )金属薄膜 ,探讨了热处理温度和时间对Cr薄膜电阻温度系数和电阻率的影响。在一定直流电压条件下 ,Ni-Cr和Cr薄膜微型加热器的加热温度可达到 10 0℃ ,且升温速率皆大于 0 5 0 C/s。通过测量微加热器的电阻温度曲线 ,表明所制备的金属薄膜式微型加热器具有较好的稳定性和重复性 ,能够满足PCR生物芯片和硅基热分布式微流量传感器的要求。Cr and Ni Cr (Ni: 80%, Cr: 20%) thin film are fabricated by RF sputtering. The impacts of the temperature and the time of heat treatment on the temperature coefficient of resistance (TCR) of Cr thin film are discussed respectively. The 100℃ temperature could be gained by using Ni Cr and Cr micro heater when the DC voltages are supplied to the heater and the rise rates over 0 5℃/s. By measuring the resistance temperature curve of micro heater, the results show that the micro heater fabricated has high reliability and repeatability and they are suitable for the use of PCR biochip and thermal distribution micro-fluidic sensor based on silicon.

关 键 词：微型加热器 TCR Cr和Ni-Cr薄膜 PCR生物芯片 微流量传感器 

分 类 号：TN605[电子电信—电路与系统]