压电陶瓷微致动器的制作及驱动行为研究  

Fabrication and Drive Characteristics of Piezoelectric Ceramic Micro-actuator for Hard Disk Drives

作　　者：荆阳[1] 雒建斌[1] 杨文言[1] 

机构地区：[1]清华大学摩擦学国家重点实验室,北京100084

出　　处：《兵工学报》2005年第1期77-81,共5页Acta Armamentarii

基　　金：国家自然科学基金资助项目 (90 2 0 60 2 2 ) ;国家"973"计划资助项目 (2 0 0 3CB7162 0 0 )

摘　　要：制作一种新型压电陶瓷微致动器 ,用于高密度硬盘驱动器磁头的精确定位。该致动器采用高d31特性的压电陶瓷材料 ,采用烧结成型工艺 ,并使用溅射和反应离子刻蚀工艺制作而成 ,然后进行了退极化性能等分析。此外 ,建立了一种有限元简化模型并分析其驱动能力。结果显示 ,当采用双层结构的压电微致动器时 ,在外加电压± 30V作用下 ,悬臂自由端位移和谐振频率分别达到 0 93μm和2 0 4 2 5kHz ,表明该致动器满足硬盘驱动器对微致动器位移 /电压灵敏度、谐振频率等要求。A new piezoelectric ceramic micro-actuator for high-density hard disk drives is proposed and developed. The device is characterized by a sintered PZT ceramic and fabricated by reactive ion etching processes. Reliability against temperature and structure is investigated to ensure the practical application of the drive product. A stainless steel (SUS304) cantilever beam attached to each side with PZT plates in between is simulated by finite element method in order to testify its driving mechanics of it. Test results reveal that an applied voltage of ±30 V is sufficient to obtain a 0.93 μm tip displacement and a high-resonance frequency of over 20.425 kHz, yielding the required servo bandwidth (13 kHz) of more than several kHz. The new piezoelectric ceramic micro-actuators possess a useful compromise performance in their displacement, resonance frequency and generative force.

关 键 词：微致动器 硬盘驱动器 高密度硬盘 磁头 制作 显示 压电陶瓷 谐振频率 反应离子刻蚀 驱动能力 

分 类 号：TP211[自动化与计算机技术—检测技术与自动化装置] TP333[自动化与计算机技术—控制科学与工程]