运动偏心对圆光栅副测量的影响及误差补偿  

Error compensation for eccentric motions of circular gratings

作　　者：郭阳宽[1] 李玉和[1] 李庆祥[1] 巩娟[1] 陈张玮[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《清华大学学报（自然科学版）》2005年第2期178-181,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家"九七三"重点基础研究项目(G1999033002)

摘　　要：研究了一种由长光栅演变而来的新型圆光栅副存在运动偏心时的正常工作条件和由运动偏心所造成测量误差的补偿方法。阐述了该圆光栅的组成结构和工作原理;推导了其莫尔条纹曲线的表达式;着重研究了运动偏心对圆光栅测量影响的分析方法,即莫尔条纹随运动偏心变化的定量分析方法;推导了由于偏心引起的测量误差的补偿公式;通过实例分析证明,对精密测量圆光栅进行偏心误差补偿是十分必要的。研究结果表明,偏心较小时,由于不影响系统正常工作,因此会掩盖这种误差的存在,通过理论分析及补偿可确保这种新型圆光栅的测量精度。A compensation method was develped for the measurement errors caused by eccentric motions for a circular grating derived from a straight-line grating. The operating principle of the circular grating is described with an expression for the moiré fringes that can be used to assess the measurement accuracy of circular gratings caused by its eccentric motion. Analysis of an actual example shows the necessity of the compensation for the eccentric by errors. Tests show that with small eccentricities, the system will work normally, but the measured results are not correct. The theoretically derived compensation guarantees the grating measurement accuracy.

关 键 词：角度测量仪 圆光栅副 运动偏心 测量误差 误差补偿 

分 类 号：TH741.2[机械工程—光学工程] TH1[机械工程—仪器科学与技术]