微间隙击穿性能的研究  

A Study on Gas Discharge Properties in Micro-gaps

作　　者：吴冲若[1] 樊玉薇[1] 

机构地区：[1]东南大学电子工程系,南京210018

出　　处：《真空电子技术》1993年第2期1-5,共5页Vacuum Electronics

基　　金：国家自然科学基金

摘　　要：本文对微米量级微间隙的电击穿性能进行了研究,在制作出微间隙试样的基础上,改变微间隙所处环境气氛以及间隙距离,测试了不同条件下的击穿电压V相对于气体压强P关系曲线,系统研究了N_2、O_2、Ar、He、Ne等环境气氛以及间隙距离对微间隙击穿性能的影响。对微间隙的静电击穿机制也进行了一些有益的探讨。Several kinds of micro-gap specimens are prepared to simulate the gas discharge properties of micro-gap between stator and rotor of static electrical micromotor. The discharge voltages of various micro-gap of different distances and ambiences (N_2, O_2, Ar, He, Ne gases) are studied with changing the gas presure, It is found out that the gap ambiences and distances have a great effect on the gas discharge voltages. The mechanism of gas discharge in micro-gap are proposed as well.

关 键 词：微间隙 电击穿性能 集成电路 硅 制造工艺 

分 类 号：TN405[电子电信—微电子学与固体电子学]