非晶薄膜晶化的频谱研究  

Study on Complex Impedance Spectra of Amorphous Films Crystallized

作　　者：谭辉[1] 陶明德[1] 李彬彬 

机构地区：[1]中国科学院新疆物理研究所

出　　处：《Journal of Semiconductors》1994年第11期754-758,共5页半导体学报（英文版）

基　　金：国家自然科学基金

摘　　要：选择一定的退火温度和退火时间，ＣｏＭｎＮｉＯ非晶薄膜可以晶化为晶粒尺寸几个至几十个纳米的微晶薄膜．复阻抗频谱和电导频谱研究表明，这种微晶薄膜的粒间效应增强，在一定频率范围内微晶薄膜的电导低于非晶薄膜的电导．认为这种微晶薄膜的粒间组成是许多个原子尺度大小的无规网络，微晶薄膜的结构为纳米晶粒和非晶网络组成的两相结构，电导符合多渠道导电模型．Abstract The CoMnNiO crystallite films with various grain size from 10urn to 20urn can be obtained by annealling for a suitable period and at a suitabe temperature. The spectra of the complex impedance and the conduction indicated that these crystallite films' intergrain effect was strengthened compared to the amorphous's.and their conduction was lower than amorphous films'. It was pointed out that these films were composed of irregular network with atomic size and nano-crystalline grains. Their conduction agreed with the multichannel conduction model.

关 键 词：非晶半导体 非晶薄膜 晶化 频谱 

分 类 号：TN304.8[电子电信—物理电子学]