类金刚石膜的制备、性能和应用  

Preparation, Properties and Applications of Diamond-Like Carbon Films

作　　者：袁镇海[1] 邓其森[1] 罗广南[1] 谢致薇[1] 郑健红[1] 

机构地区：[1]广州有色金属研究院

出　　处：《材料科学与工程》1994年第4期32-38,共7页Materials Science and Engineering

摘　　要：本文简单介绍了类金刚石膜的制备方法、并讨论了膜成分、结构、电阻率、硬度、内应力和附着力等性能，总结了类金刚石膜在机械、电子、声学、电子计算机、光学和医学等领域的应用状况以及将来的发展趋势。The deposition methods of Diamond-Like Carbon films are briefly introduced in this paper.The properties of the films such as chemical composition,structure, specific resistance, hardness, internal stress and adhesion, are also discussed here. Finally, the applications of the films in the fields of machinery,electronics, acoustics, computer, optics and medicine, etc., are summarized.

关 键 词：类金刚石膜 性能 应用 

分 类 号：TN304.18[电子电信—物理电子学] TN304.055