Cu－37at％　Ag共晶合金的离子溅射研究  

Investigation of ion sputtering for eutectic Cu-37at%Ag alloys

作　　者：王震遐[1] 潘冀生[1] 章骥平[1] 陶振兰[1] 朱福英[1] 赵烈[1] 张慧明[1] 

机构地区：[1]中国科学院腐蚀科学开放研究实验室,中国科学院上海原子核研究所,杭州大学

出　　处：《核技术》1994年第8期455-462,共8页Nuclear Techniques

基　　金：国家自然科学基金

摘　　要：侧重研究了入射Ａｒ＋离子不同剂量轰击时表面微形貌和溅射原子角分布之间的关联，并建议用“元素按靶点表面微形貌特征局域富集模型”来解释溅射原子角分布形状以及择优溅射曲线的变化；发现其结果与实验相符合。Angular distributions of sputtered atoms and the phenamenon of element locally rich relative to microtopographic feature(ELR-MTF) of sputtered target surface have been investigated for Cu-37 at%Ag alloys by means of RBS,SEM and EPMA measurements.In this paper,emphasis will be put on the correlation between surface topography caused by Ar+ ion bombardment with different doses and angular distribution of sputtered atoms ejecting from various micro-zones at topographical surface during sputtering.The experiment result was explained with the so-called ELR-MTF model which can qualitatively interpret the shape of the angular distributions and the variation of the preferential sputtering curves.

关 键 词：角分布 溅射 表面形貌 合金 

分 类 号：TG174.44[金属学及工艺—金属表面处理]