用于绝对距离测量的0．6328μm氦－氖激光外差干涉仪  

Dual Mode He-Ne 0. 6328μm Laser Heterodyne Interferometer for Absolute Distance Measurement

作　　者：赵洋[1] 任伟明[1] 

机构地区：[1]清华大学精密仪器系

出　　处：《计量学报》1994年第1期22-26,共5页Acta Metrologica Sinica

摘　　要：提出了一种用于绝对距离测量的新型外差干涉仪，它采用０．６３２８μｍ双模氦－氖激光器，光外差干涉和电信号混频、比相技术，直接测量合成波小数级次。此法避免了该领域常用的外差干涉仪的不足和拍波干涉仪结构复杂的问题，而且测量精度高、抗干扰能力强、测量时间短，使绝对距离测量技术更具有实用性。A new type of laser heterodyne interferometer for the measurement of absolute distance is proposed. It employs a dual mode He-Ne 0.6328μm laser, the technology of optical heterodyne, electric heterodyne and phase comparison to measure the fraction fringe of synthetic wavelength directly. With this new method, it is superior to usual heterodyne interferometer and beat interferometer for absolute distance measurement in anti-interference, short measurement time and high accuracy.

关 键 词：距离 测量 激光外差 干涉仪 

分 类 号：TH744.3[机械工程—光学工程]