MgO和STO基片上制备YBCO高温超导薄膜生长研究  

Investigation of the Evolution of YBa_2Cu_3O_7-x Films Deposited on MgO and STO Substrates

作　　者：谢廷明[1] 陶伯万[1] 熊杰[1] 陈家俊[1] 刘兴钊[1] 李言荣[1] 

机构地区：[1]电子科技大学,成都610054

出　　处：《微纳电子技术》2005年第3期115-118,共4页Micronanoelectronic Technology

基　　金：国家863计划资助项目(2002AA306271)

摘　　要：用AFM和XRD研究在MgO和STO基片上外延生长2-200nm的YBCO高温超导薄膜的生长机制。采用倒筒式直流溅射装置,首次实现单轴驱动双轴旋转技术,本质上实现同时在MaO基片和STO基片上沉积同一均匀厚度的YBCO薄膜。YBa2Cu3O7-x (YBCO) high temperature superconductor thin films with sequential thickness ranging from 2 to 200 nm on MgO and SrTiO3 substrates has been systematically investigated with atomic force microscopy (AFM) and XRD to study the growth methnisms prepared by inverted cylindrical DC sputtering method. Combined with out-of-plane rotation with in-plane rotation together, this system has been used to in-situ deposit films on separated substrates under essentially identical deposition.

关 键 词：高温超导 薄膜 钛酸锶 氧化镁 双轴旋转 

分 类 号：O484.1[理学—固体物理]