氧化铝薄膜纳米孔的孔径对电解电压的依赖性  

Dependence of the Pore Diameter of the Alumina Film with Nano-Pore Structure on Anodizing Voltage

作　　者：王为[1] 巩运兰[1] 王惠[1] 郭鹤桐[1] 

机构地区：[1]天津大学化工学院,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2005年第3期229-232,共4页Journal of Tianjin University：Science and Technology

基　　金：国家自然科学基金资助项目(50071040).

摘　　要：为了确定电解电压与氧化铝薄膜纳米孔孔径之间的内在关系,以20%的磷酸为电解液,在40～150 V的电解电压范围内,对铝基材实施阳极氧化制备了具有纳米孔结构氧化铝薄膜.用环境扫描电镜(ESEM)观察结果表明,阻挡层中微裂纹的产生是形成纳米孔的先决条件,微裂纹的长度决定了孔径的大小.微裂纹的长度由阻挡层中的内应力决定,内应力由γ-Al2O3,与金属铝基体的匹配度决定,匹配度由γ-Al2O3的晶粒尺寸决定.X射线衍射(XRD)的分析结果表明,电解电压决定了氧化铝薄膜中γ-Al2O3晶粒尺寸的大小.因此,电解电压决定了氧化铝薄膜纳米孔的孔径.In order to find out internal relation between anodizing voltage and pore diameter of alumina film, (alumina) films with nano-pore structure were prepared by anodic oxidation of aluminum in 2~0_0H_3PO_4 at the anodizing voltage from 40 V to 150 V. Environment scan electron microscope (ESEM) images show that the generation of the micro-cracks was precondition of the nano-pore formation. Pore diameter was determined by micro-crack′s size. Micro-crack′s size was determined by internal stress. Internal stress was determined by match level between of the γ-Al_2O_3 and Al, match level was determined by crystallite dimension of the γ-Al_2O_3. X-radial diffraction (XRD) results showed that the crystallite dimensions of the alumina films were determined by the anodizing voltage. In short, the pore diameters were determined by anodizing voltage.

关 键 词：氧化铝薄膜 电解电压 内应力 微裂纹 孔径 

分 类 号：O646.542[理学—物理化学] TQ536[理学—化学]