Polymer/Si AWG器件材料光学性质的准确测量  

Accurate Measurement of Optical Properties for Polymer/Si AWG Device Material

作　　者：姜文海[1] 侯小柯[1] 崔占臣[2] 张大明[1] 

机构地区：[1]集成光电子学国家重点联合实验室吉林大学实验区,长春130012 [2]吉林大学化学学院,长春130023

出　　处：《吉林大学学报（理学版）》2005年第2期185-189,共5页Journal of Jilin University:Science Edition

基　　金：国家高技术研究发展计划研究项目(863)基金(批准号:2001AA312160);国家重点基础研究发展规划项目(973)基金(批准号:TG2000036602);国家自然科学基金(批准号:60177022)

摘　　要：使用WVASE32型椭偏仪,对Si基单层有机薄膜的测量方法进行分析;并对聚甲基丙烯酸甲酯(PMMA)材料和氟化聚酯材料进行测量,根据测量结果对阵列波导光栅(AWG)器件进行设计.在124nm到1700nm之间可测量出任意波长的折射率,其均方差(MSE)均远小于1,证明测量结果极其准确.同时探讨了对多层有机薄膜及氟化聚合物薄膜的测量方法.We analyzed the measurement method of Si-based organic single-films using a model WVASE32 ellipsometer and measured the films of polymethyl methacrylate(PMMA) and fluoro-polyester material. According to the results, we designed the arrayed waveguide grating (AWG) devices. Refractive index can be exactly measured between 124 nm and 1 700 nm, and mean square error(MSE) is far less than 1. Such result suggested that the measurement is very precise. At the same time we discussed the measurements of multilayer organic films and polymer fluoride films.

关 键 词：列阵波导光栅 聚合物 光学系数 椭偏仪 

分 类 号：O436[机械工程—光学工程]