利用数字散斑相关法测定聚酰亚胺/SiO_2合成薄膜的力学性能  

Experimental Studies on the Mechanical Properties of the Polyimide /SiO_2 Film by the Digital Speckle Correlation Method

作　　者：董萼良[1] 康新[1] 陈凡秀[1] 林保平[2] 何小元[1] 

机构地区：[1]东南大学工程力学系,南京210096 [2]东南大学化学化工系,南京210096

出　　处：《实验力学》2005年第1期109-114,共6页Journal of Experimental Mechanics

基　　金：国家自然科学基金(10072017);科技部"863"计划(2002AA404140)资助项目

摘　　要：聚酰亚胺 /SiO2 合成薄膜是一种具有优良力热光电性能的薄膜材料,在MEMS工艺中具有广阔的应用前景,其力学性能测量的研究具有非常重要的意义。本文将数字散斑相关技术和微拉伸试验相结合,对厚度为 37μm的聚酰亚胺(polyimide) /二氧化硅(SiO2 )合成薄膜进行了力学性能测量,获得了比较满意的结果。文章给出了测得的弹性模量和泊松比。为了解决数字散斑相关法不能直接测量较大变形的缺陷,本文提出了多级相关算法,并利用亚像素搜索和双线性插值进行了数据处理。The polyimide/SiO\-2 film is a kind of film material which has extremely properties of mechanics, heat, light and electricity and therefore has very wide application in the micro-electro-mechanical system (MEMS) material technology. It has special important point to measure the mechanical properties of the polyimide /SiO\-2 film. The digital speckle correlation technique and the micro-draw experiment were combined in this paper. The methods of the sub-pixels search and bilinear interpolation were used in the digital image processing. As the digital speckle correlation method (DSCM) cannot be directly used in measuring a large deformation, an improved multilevel DSCM was proposed. The mechanical properties of the polyimide /SiO\-2 film with 37μm thickness was measured in the experiments. The results of the experiments are satisfied. The Young's modulus and the Possion's ratio are presented.

关 键 词：数字散斑相关法 合成薄膜 聚酰亚胺 SiO2 力学性能 数字散斑相关技术 测定 MEMS工艺 性能测量 双线性插值 薄膜材料 光电性能 拉伸试验 二氧化硅 弹性模量 直接测量 相关算法 数据处理 泊松比 大变形 亚像素 搜索 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TQ328.307[自动化与计算机技术—控制科学与工程]