双法—珀光纤干涉仪及条纹定位法读数  

The Dual Fabry-perot Fibre Interferomter and the Fringe Location Method

作　　者：王春和[1] 叶声华[1] 

机构地区：[1]天津大学精密仪器系

出　　处：《仪器仪表学报》1994年第1期18-21,共4页Chinese Journal of Scientific Instrument

摘　　要：双法—珀干涉型光纤位移传感器对光源的相干性要求很低,发光二极管LED即可作为光源。这种光源的优点是可以克服半导体激光光源的初始条件模糊及反馈引起的噪声等。用干涉条纹定位法测量传感腔长的变化,定位重复精度为4nm。The advantges of optical fibre displacement sensor with dual Fabry- Perot interferomters are lowering the requirement of source coherence so a LED is used as the source. The indistinct measurment utilizing coherence sourece is avoided because of using uncoherence source. The change of length of the sensing cavity is measured by location method of the interferential fringe. The experimental standard deviation of aiming fringe is confirmed to be within 4nm.

关 键 词：双法-珀光纤 干涉仪 条纹定位法 

分 类 号：TH744.3[机械工程—光学工程]