压电晶体双晶片汞传感器  

MERCURY SENSOR WITH BI-WAFER OF PIEZOELECTRIC CRUSTAL

作　　者：李光云[1] 陆新根[1] 王科峰[1] 杜根娣[1] 

机构地区：[1]中科院上海冶金研究所,华南师范大学量子电子学研究所

出　　处：《应用科学学报》1994年第1期53-56,共4页Journal of Applied Sciences

摘　　要：设计了新型的压电晶体传感器探头，使参考晶片与传感晶片同时直接接触待测气体．试验了使用该结构的压电晶体双晶片汞传感器的测汞性能和对水份干扰的影响．实验结果表明：在相当大的范围内．参考晶片接触待测气体并不影响传感器对汞蒸汽的探测，而且还减少了水份等气氛的干扰．A new type of piezoelectric crystal sensor detector is designed. The referencewafer and the sensitive wafer are in touch with the detected gases directly at thesame time. The mercury vapor response and the interference influence of moistureare tested using the piezoelectric crystal mercury sensor with a double wafer.Results show that in a wide range mercury vapor detection is not influenced bythe sensor,when the reference wafer touches the detected gases. Moreover theinterference of moisture or any other gas can be greatly decreased.

关 键 词：压电晶体 汞传感器 晶片 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]