基于SU-8胶转子的非接触压电微马达  

A Non-contact Piezoelectric Micromotor Using SU-8 Resist Rotor

作　　者：杨斌[1] 刘景全[1] 周广华[1] 陈迪[1] 张金娅[1] 蔡炳初[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院薄膜与微细技术教育部重点实验室微米纳米加工技术国家级重点实验室,上海200030

出　　处：《微细加工技术》2005年第1期63-66,共4页Microfabrication Technology

基　　金：国家自然科学基金资助项目(50205017)

摘　　要：研制了一种非接触压电微马达,通过阻抗分析仪对定子进行扫频测试,确定其共振频率,并且详细介绍了SU 8胶转子制作的工艺流程。利用转速仪比较不同形状和尺寸的转子在调频和调压下的转速,从而确立压电微马达的最优转子。转子半径为6mm,叶片宽度为6mm的三叶片转子转速最高为3569r/min。转子的启动电压和最高电压分别为8V和24V。A non-contact piezoelectric micromotor has been fabricated and the resonant frequency of the stator is measured by HP4191A impedance/gain-phase analyzer. The fabrication process of SU-8 resist rotor is described in detail. The revolution speeds of different shapes and diameters rotor at variable frequency or variable voltage are measured by revolution meter. The revolution speed of optimal rotor with three blades, radius of 6 mm and blade width of 6 mm, is (3 569 r/min.) The initial and maximum electric voltages are 8 V and 24 V, respectively.

关 键 词：SU-8胶转子 非接触 压电微马达 

分 类 号：TM282[一般工业技术—材料科学与工程]