轮廓仪检测的系统误差分析  

Analysis on System Error of Profilometer Testing

作　　者：程子清[1] 耿安兵[1] 杨长城[1] 

机构地区：[1]华中光电技术研究所,武汉430073

出　　处：《光学与光电技术》2005年第2期41-44,共4页Optics & Optoelectronic Technology

摘　　要：从轮廓仪的工作原理出发,分析了影响轮廓仪检测精度的主要系统误差,并以二次旋转非球面为例计算了系统误差对面形检测精度的影响,得出Talysurf轮廓仪在测量时,系统误差对面形误差的影响随顶点曲率的绝对值、口径以及偏心率函数的增大而增大,随定位误差和不重合误差的增大而增大的结论。最后的实验结果证明了该结论的正确性。Based on the working principle of profilometer, the primary system error that affects the testing accuracy of the profilometer is analyzed. As an example of the rotationally symmetrical conicoid aspheric surface, the effect of the system error on the profile testing is analyzed. The effect will increase with the increasing of the curvature, the aperture, the function of eccentricity, also increase with the increasing of the locating error and non-registering error.

关 键 词：轮廓仪 非球面检测 系统误差 

分 类 号：TH741.3[机械工程—光学工程]