用于超宽焦斑光束整形的大口径衍射光学元件设计和制作  

Development of large aperture diffractive optical element for super-wide focal-spot beam shaping

作　　者：赵逸琼[1] 王建东[1] 张晓波[1] 李永平[1] 伍源[2] 王旭迪[2] 傅绍军[2] 

机构地区：[1]中国科学技术大学物理系,安徽合肥230026 [2]中国科学技术大学国家同步辐射实验室,安徽合肥230027

出　　处：《量子电子学报》2005年第2期150-154,共5页Chinese Journal of Quantum Electronics

基　　金：国家863-804课题资助项目

摘　　要：采用改进混合优化算法首次设计并制作了口径168.7 mm的连续衍射光学元件实现类环形光束入射,输出直径650μm超宽焦斑光束均匀照明。用Nd:YAG脉冲激光器1.064μm波长激光进行实验,获得了与设计尺寸相符、边缘陡峭、无中心尖锐脉冲、具有极好的离焦宽容性的宽焦斑,但焦斑顶部不均匀性较大。对此进行了深入的模拟分析,结果表明:焦斑顶部较大的光强调制主要来源于现有的工艺及实验条件误差。Large aperture diffractive optical elements (DOE) for quasi-annular beam shaping are development. Improved hybrid algorithms including self-iterative algorithm. Quasi-Gradient Descent algorithm and Fourier filtration have been used to design such DOE to form a 650 μm-diameter focal spot in uniform illumination. Hollowed-out mask and ion beam etching system are developed to fabricate the DOE. The performance of the DOE is experimentally studied with 1.064 μm pulsed laser. Wide focal spot with the corresponding size and sharp edge but great modulation are obtained even with large deviation from focus distance. The theoretical analysis with experiment conditions shows that the technical error may be the main reason for the modulation.

关 键 词：应用光学 衍射光学元件 准梯度下降法 镂空掩膜板 离子束刻蚀 

分 类 号：O443[理学—电磁学]