基底元素表面富集与扩散阻档层  

SUBSTRATE ELEMENT SURFACE ENRICHMENT AND DIFFUSION BARRIER

作　　者：刘友婴[1] 李望[2] 展振宗 

机构地区：[1]天津南开大学电子科学系,天津300071 [2]天津理化工程研究院,300180

出　　处：《真空科学与技术》1994年第4期243-245,共3页Vacuum Science and Technology

摘　　要：根据An－Ag系统以及An－Cu系统的扩散系数计算，提出了扩散阻挡层模型。利用这个模型对Au－Ag系统进行有关实验，得利了较好的验证。According to the calculation results of diffusion coefficients for An-Ag and Au-Cu systems the model of diffusion barrier has been proposed in this paper and using the model of diffusion barrier the relative experiments of barrier for the Au-Ag system have been done. It can be obtained from the experiments that the model has been verified quite well for the Au- Ag system.

关 键 词：元素表面富集 扩散系数 扩散阻档层 电负性 

分 类 号：O652.6[理学—分析化学] TN104.1[理学—化学]