测量多层膜结构中薄膜厚度的一种新方法  

A Novel Method for Measuring Film Thickness in Layered Structure

作　　者：陈希明[1] 马靖[1] 徐晟[1] 吴小国[1] 孙大智[1] 杨保和[1] 

机构地区：[1]天津理工大学光电系,天津300191

出　　处：《光电子．激光》2005年第4期466-469,共4页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(60276001);天津自然科学基金资助项目(023601711;033700611)

摘　　要：提出一种基于平行板电容测微原理进行多层膜材料的测厚方法。该方法用有效电极直径Φ3 mm电容传感头,通过变化空气隙Δh进行多次测量,对输出电压V值进行线性拟合,得到空气隙与测量电压的关系,计算出被测厚度,测量精度达0.01μm。若采用有效电极直径Φ1 mm传感头,测量精度可达0.001μm。通过理论分析和实验证实,该方法不需对被测材料提前标定相对介电常数,不需特殊制备样件,是非接触测量,测量方法简单、成本低。因此适用于各种薄膜、特别是多层结构膜的无损膜厚测量及平面度测量。A novel measurement method for multilayered films thickness was presented based on capacitance principle.The probe diameter is 3 mm.The relationship between air gap and V_0 (output voltage) was obtained by linear fitting,and then precise thickness of the film was got.This method do not need to known ε (relative dielectric constant) and make special sample.This method adapts to measure thickness of various films in the precision of 0.01 μm.The precise can reach to 0.001 μm if the probe diameter is 1 mm.Additionally,this method is simpel and low cost.

关 键 词：多层膜结构 薄膜厚度 相对介电常数 电极直径 测量精度 平行板电容 非接触测量 平面度测量 线性拟合 输出电压 测量电压 测量方法 膜厚测量 多层结构 传感头 空气隙 膜材料 成本低 

分 类 号：TQ597[化学工程—精细化工] O484.5[理学—固体物理]