高聚物生物芯片材料激光加工性能分析  

Research of polymers used in fabrication of biochip

作　　者：祁恒[1] 陈涛[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022

出　　处：《激光技术》2005年第2期138-141,共4页Laser Technology

基　　金：国家自然科学基金重点资助项目 (50335050);国家自然科学基金资助项目 ( 50175002 );北京市自然基金重点资助项目 ( 3031001 );北京市科技新星计划资助项目(H013610210112)

摘　　要：用准分子激光对高聚物材料进行微加工制作,可以获得比较理想的高聚物基生物芯片。根据对制作生物芯片材料的性能要求,比较了聚甲基丙烯酸甲酯(PMMA)和聚碳酸酯(PC)对不同波长激光的光波透过率,测量了高聚物材料经准分子激光加工后的微结构,并得出准分子激光对不同材料的刻蚀速率与入射激光能量密度之间的关系。结果表明,PMMA和PC都能够完全吸收KrF准分子激光能量,可以用准分子激光在表面进行微加工制作生物芯片;用PMMA制作出的生物芯片,在使用时对检测结果的质量影响比PC小;对于相同的入射激光能量密度,准分子激光对PMMA的刻蚀率比PC高;由于与准分子激光之间的反应机理不同,PMMA更容易被加工,但是加工后的微结构质量较PC差。Using excimer laser to manufacture polymer materials c an get more ideal biochips. Considering the needed performances of materials use d in fabrication of biochips,PMMA and PC’s properties are compared. These prop erties involve in the transmittance of light waves of different wavelengths.The micro-structure of polymer materials after micromachined by excimer laser,the correlation of the ablation depth per pulse with different fluences of excimer laser for different polymers is measured. The energy of KrF excimer laser can be totally absorbed by PMMA and PC,therefore micromachining of biochip can be don e by using excimer laser on PMMA and PC’s surfaces.The influence on detection q uality of PMMA is smaller than PC. The ablation depth per pulse of PMMA to excim er laser is higher than PC under the same fluence.PMMA is manufactured more easi ly but the quality of micro-structure ablated is worse than PC because of diffe rent reaction mechanics to excimer laser.

关 键 词：生物芯片 高聚物 准分子激光 微加工 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]