多层膜膜层缺陷对透射率的影响  

Film Defect Influences on Transmissivity of Multi-layer Film

作　　者：杨帆[1] 沈军[1] 孙骐[1] 周斌[1] 

机构地区：[1]同济大学波耳固体物理研究所,上海200092

出　　处：《同济大学学报（自然科学版）》2005年第4期494-497,共4页Journal of Tongji University:Natural Science

基　　金：国家自然科学基金重点项目和面上资助项目(20133040;69978017);国家'八六三'高技术发展计划资助项目(2002AA842052);上海纳米科技与产业促进中心资助项目(0152nm012;0159nm039);上海市重点学科建设及上海市科技发展基金资助项目(02SL001)

摘　　要：采用溶胶-凝胶技术镀制ZrO2PVP/SiO2多层膜,用紫外-可见分光光度计研究其光学特性,发现与理论预期有很大偏差.采用EssentialMacleod膜系设计程序对ZrO2PVP/SiO2多层膜可能存在的膜层缺陷进行理论上的模拟.通过理论模拟和实验结果的比较,发现引起多层膜光学性能下降的主要原因是膜间渗透和薄膜开裂.The ZrO_2-PVP/SiO_2 multi-layer films were prepared through the sol-gel process. The optical properties of the films were studied by the UV-Vis spectrometer and many differences were found between the experimental and ideal transmission spectrum of the films. Some defects of the multi-layer films were simulated using the Essential Macleod optical coating design program. The experimental results were compared with the theoretical simulation. It was found that the main reasons for the deterioration of the film optic properties were the infiltration and cracking of the film.

关 键 词：溶胶-凝胶技术 缺陷 透射率 ESSENTIAL Macleod软件 

分 类 号：O433.4[机械工程—光学工程]