高精度步进压印机热误差的建模分析  

Modeling of Thermally Induced Error for High-Precision Step Imprint Tool

作　　者：严乐[1] 卢秉恒[1] 丁玉成[1] 刘红忠[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049

出　　处：《西安交通大学学报》2005年第5期526-530,共5页Journal of Xi'an Jiaotong University

基　　金：国家重点基础研究发展规划资助项目(2003GB716202);国家高技术研究发展计划重点资助项目(2002AA20050);国家自然科学基金资助项目(5027118)

摘　　要：为了消除由紫外光曝光所引起的步进压印机的热误差,以提高压印机的套刻对准精度,运用逐步回归分析法选取了压印机上温度测量点的数量,将压印机上布置的温度传感器从15 个减少到6 个,并建立了压印机温度测量关键点处的温度与压头在x、z方向热误差关系的数学模型.实验结果与模型计算结果的对比分析表明,模型的热误差预测精度在x方向可以达到89%,而在z方向可以达到93%.应用表明,该方法是一种在压印机热误差建模中选择温度测量关键点的有效方法,可避免热误差建模过程中的变量耦合问题,从而提高了模型的精确性.Thermally induced error during the exposure process is a major contribution to the repeatable alignment accuracy of the step imprint tool in imprint lithography system. A modeling based on the multiple regression analysis was proposed for the real-time prediction of thermally induced errors with multiple temperature measurements, and the measurement points were reduced from 15 to 6. The experimental results show that the method accurately predicts the time-variant thermally induced error under different condition, the error predicting veracity reaches to 89% in x direction and 93% in z direction. As a highly accurate predictor, this method solves the difficulties of the variable coupling.

关 键 词：印光刻 步进压印机 热误差 温度场 建模 

分 类 号：TN305[电子电信—物理电子学]