甲烷浓度对金刚石薄膜织构的影响  

Effect of Methane Concentration on Diamond Film Texture

作　　者：陈志红[1] 余志明[1] 许向阳[2] 刘王平[2] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]长沙矿冶研究院,长沙410012

出　　处：《金刚石与磨料磨具工程》2005年第2期21-24,35,共5页Diamond & Abrasives Engineering

基　　金：株硬集团合作项目

摘　　要：采用热丝化学气相沉积法,以甲烷和氢气为反应气体,在硬质合金YG6基体上沉积了金刚石薄膜。研究了不同的甲烷浓度对金刚石织构变化趋势的影响。分别采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)对金刚石膜的表面形貌、织构形成进行了分析。结果表明:当基体温度为760℃,沉积气压为4×103Pa,甲烷浓度从1%到5%,都形成了(110)织构。但是,当甲烷浓度为3.3%时,有(100)织构。Diamond films was synthesized on a cemented carbide (YG6) substrate using the gaseous mixtures of methane and hydrogen by hot .filament chemical vapor deposition (HFCVD). The tendency of diamond texture change was studied on the condition of various methane concentration. The surface morphology and texture of samples were characterized by scanning electron microscopy (SEM) and X-ray diffractometer(XRD) method respectively. The experimental results show that when the substrate temperature is 760℃ , deposition pressure is 4 × 103 Pa and the methane concentration is from 1 % to 5% , diamond (110) texture is formed. But, when the methane concentration is 3.3%, (100) texture diamond film is deposited.

关 键 词：热丝化学气相沉积 硬质合金 金刚石薄膜 织构 

分 类 号：TB43[一般工业技术]