亚微米级叉指型超微带电极阵列的加工和电化学表征  

Fabrication and Electrochemical Characterization of Submicrometer Interdigitated Ultramicroelectrode Arrays

作　　者：朱明智[1] 蒋庄德[1] 景蔚萱[1] 

机构地区：[1]机械制造系统工程国家重点实验室

出　　处：《高等学校化学学报》2005年第5期838-840,F012,共4页Chemical Journal of Chinese Universities

基　　金：国家重点基础研究发展计划项目(批准号:2003CD716201;2003CD716202)资助.

摘　　要：A gold submicrometer interdigitated ultramicroelectrode array(IDA) was fabricated by conventional photolithographic patterning of multilayered materials. The IDA structure, which consists of 50 pairs of fingers and has 1.5 mm finger length and 362 nm functional band width, is fabricated in a small region(1.5 mm×2.3 mm) on a quartz substrate. The electrode surfaces are inside the (trenches). Gold film thickness is the electrode width that is exactly measured by atomic force microscopy(AFM). The surface topographies of gold film and substrate are characterized by AFM for the study of the variation of electrode width. Scanning electron microscopy(SEM) is used to visualize the quality of fabrication and to measure the fingers. Electrochemical properties of IDA electrodes are investigated by cyclic voltammetry through three-electrode system. It is shown that IDA electrodes can be used as the disposable ultramicroelectrodes of chemical and biologic sensors.A gold submicrometer interdigitated ultramicroelectrode array(IDA) was fabricated by conventional photolithographic patterning of multilayered materials. The IDA structure, which consists of 50 pairs of fingers and has 1.5 mm finger length and 362 nm functional band width, is fabricated in a small region(1.5 mm×2.3 mm) on a quartz substrate. The electrode surfaces are inside the (trenches). Gold film thickness is the electrode width that is exactly measured by atomic force microscopy(AFM). The surface topographies of gold film and substrate are characterized by AFM for the study of the variation of electrode width. Scanning electron microscopy(SEM) is used to visualize the quality of fabrication and to measure the fingers. Electrochemical properties of IDA electrodes are investigated by cyclic voltammetry through three-electrode system. It is shown that IDA electrodes can be used as the disposable ultramicroelectrodes of chemical and biologic sensors.

关 键 词：叉指型超微带电极阵列 微细加工技术 循环伏安法 

分 类 号：O657.15[理学—分析化学]