A cylindrical rod ultrasonic motor with 1 mm diameter and its application in endo-scopic OCT  

作　　者：ZHOUTieying ZHANGKai CHENYu WANGHuan WUJigang JIANGKaili XUEPing 

机构地区：[1]DepartmentofPhysicsandKeyLaboratoryofAtomicandMolecular-Nano-Sciences,MinistryofEducation,TsinghuaUniversity,Beijing100084,China

出　　处：《Chinese Science Bulletin》2005年第8期826-830,共5页

基　　金：supported by the National Natural Science Foundation of China(Grant No.50235010);973 Project(No.001CB510307)the National Science Foundation of Beijing(3012007);the Technology Foundation of Shenzhen.

摘　　要：A tiny ultrasonic motor was constructed by using a piezoelectric ceramic cylindrical rod as a vibration generator of the stator. The fabricated tiny motor has a di- ameter of 1 mm, a length of 5 mm and a weight of 36 mg. The resonant frequency is 32 kHz with one fixed boundary or 83 kHz with two free boundaries. Four silver electrodes were deposited on the cylindrical surface. The spacing be- tween two adjacent electrodes was carefully designed. A method was developed for the polarization of the stator. By using the bending vibration mode of the stator, the motor shows a performance with a speed of 1800 rpm and a stalled torque of 4 μ Nm, and can bear a high driving voltage up to 350 Vpp. The motor was used to drive an optical prism for circular scanning in an endoscopic OCT system. The tomo- graphic images of the inner cavities of a plastic tube and a scallion were obtained, and the resolution was of the order of micrometer-scale.A tiny ultrasonic motor was constructed by using a piezoelectric ceramic cylindrical rod as a vibration generator of the stator. The fabricated tiny motor has a diameter of 1 mm, a length of 5 mm and a weight of 36 mg. The resonant frequency is 32 kHz with one fixed boundary or 83 kHz with two free boundaries. Four silver electrodes were deposited on the cylindrical surface. The spacing between two adjacent electrodes was carefully designed. A method was developed for the polarization of the stator. By using the bending vibration mode of the stator, the motor shows a performance with a speed of 1800 rpm and a stalled torque of 4 mu Nm, and can bear a high driving voltage up to 350 V-pp. The motor was used to drive an optical prism for circular scanning in an endoscopic OCT system. The tomographic images of the inner cavities of a plastic tube and a scallion were obtained, and the resolution was of the order of micrometer-scale.

关 键 词：圆柱杆 超声波电机 摆动弯度 内窥镜检查 循环扫描 

分 类 号：TH776[机械工程—仪器科学与技术]