聚乙烯吡咯烷酮为稳定剂的PZT厚膜制备与性能  

Preparation and Characteristics of PZT Thick Films Fabricated Using PVP as Stabilized Agent

作　　者：车俊[1] 姚熹[1] 史鹏[1] 

机构地区：[1]西安交通大学电子材料研究所,陕西西安710049

出　　处：《空军工程大学学报（自然科学版）》2005年第3期82-84,共3页Journal of Air Force Engineering University(Natural Science Edition)

基　　金："973"计划资助项目(2002CB613305)

摘　　要：介绍了通过添加聚乙烯吡咯烷酮(PVP)制备PZT厚膜的方法。采用溶胶凝胶工艺,在700℃快速热处理4层即可获得厚度为1μm,表面平整没有裂纹的PZT厚膜。对PVP的作用机理进行分析,同时对厚膜的结构形貌和电性能进行研究测试。厚膜呈完全钙钛矿相多晶结构,而且具有良好的铁电性能。A modified Spin - coating method for PZT thick film is introduced. In order to improve the properties, an organic macromolecule polyvinyl pyrrolidine (PVP), which has the hybrid effects, is dispersed uniformly into the sol-gel precursor solution of PZT. The films are coated by repetitive spin- coating and then annealed at a proper temperature. Then the microstructure and electrical properties are measured respectively. PZT thick films are of polycrystalline and perofskite structure.

关 键 词：PZT 厚膜 铁电性能 PVP 溶胶-凝胶 

分 类 号：TN3[电子电信—物理电子学]