射频溅射功率对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响  

The influence of sputtering power on the giantmagneto-impedance of FeZrBCu films

作　　者：王文静[1] 萧淑琴[1,2] 刘宜华[1,2] 陈卫平[1,3] 代由勇[1] 姜山[1] 袁慧敏[1] 颜世申[1] 

机构地区：[1]山东大学物理与微电子学院 [2]山东大学晶体材料国家重点实验室,济南250100 [3]浙江台州学院物理系,临海317000

出　　处：《物理学报》2005年第4期1821-1825,共5页Acta Physica Sinica

基　　金：山东省优秀中青年科学家科研奖励基金;山东大学青年基金资助的课题~~

摘　　要：用射频溅射法制备了FeZrBCu软磁合金薄膜 .研究了不同溅射功率对FeZrBCu薄膜软磁特性和巨磁阻抗效应的影响 .用电子探针显微镜测量发现 ,当溅射功率为 2 4 0W时 ,薄膜样品中Fe的原子含量为 87 32 % ,Cu的原子含量为 2 9% .这种样品的矫顽力最小 ,为 6 8A m ,饱和磁化强度约为 1 11× 10 5A m ,软磁性能最佳 ,巨磁阻抗效应最大 ,溅态膜在 13MHz最大巨磁阻抗比纵向为 17% ,横向为 11% .重点分析了阻抗的电阻、电感分量及横向有效磁导率随频率的变化 ,得到在低频下主要是磁电感效应 ,此时磁导率对电感分量的变化起重要作用 .The giant magneto- impedance (GMI) effect has been observed at room temperature in soft magnetic alloy films of FeZrBCu prepared by radio frequency (RF) sputtering. The dependence of the soft magnetic properties and the GMI effect on the RF sputtering power has been studied. The results measured by electron probe micro-analysis show that the as-deposited films sputtered at 240 W possess 2.9at% Cu and 87.32at% Fe. This sample possesses excellent soft magnetic properties and a maximum value of GMI effect, the coercive force is about 68 A/m, the saturation magnetization is about 1.11 x 10(5) A/m, and the maximum GMI ratios are 17% and 11% in longitudinal and transverse fields at frequency of 13 MHz, respectively. In addition, the dependence of resistance R, inductance X and effective permeability mu(e) on the frequency has been investigated, and the results show that the GMI effect is mainly a magneto- inductive effect at low frequencies.

关 键 词：铁基合金 薄膜生长 巨磁阻抗效应 射频溅射功率 

分 类 号：O484[理学—固体物理]