圆柱腔内微波等离子体激励的研究  

Study on Microwave Plasma Excitation in a Cylindrical Cavity

作　　者：廖斌[1] 张莲[1] 安同一[1] 朱守正[1] 

机构地区：[1]华东师范大学微波研究所,上海200062

出　　处：《华东师范大学学报（自然科学版）》2005年第2期52-57,共6页Journal of East China Normal University(Natural Science)

基　　金：国家自然科学基金(19971027;10271048)

摘　　要：根据谐振腔理论,证明圆柱反应腔内的主模为TM01p模,并在圆柱坐标下采用FD-TD数值方法求解圆柱形反应腔中的场分布情况,改善和提高微波等离子体反应装置的激励性能.等离子体实际分布与场分布的预测结果基本吻合.According to resonant theory, it was justified that TM01p was the main mode in a cylindrical cavity . Finite difference time domain(FD-TD)in cylindrical coordinate system was used to simulate the electromagnetic field distributions inside the reactor to improve performances. The experimental results are in good agreement with the theoretical predictions.

关 键 词：微波等离子体 圆柱腔 TM01p模 FD-TD数值方法 

分 类 号：TN99[电子电信—信号与信息处理]