检测微表面形貌的Mirau相移干涉轮廓仪  

Mirau Phase-Shifting Interferometer for Microsurface Topography Measurement

作　　者：张红霞[1] 张以谟[1] 井文才[1] 周革[1] 李岩[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院

出　　处：《天津大学学报（自然科学与工程技术版）》2005年第5期377-380,共4页Journal of Tianjin University：Science and Technology

基　　金：国家自然科学基金资助项目(60377031);973计划资助项目(2003CB314907)

摘　　要：基于Mirau双光束干涉,研制了检测微表面形貌的Mirau相移干涉轮廓仪.柯拉照明提供被测面均匀的照明,干涉成像系统是长工作距无限筒长干涉显微镜结构,由Mirau干涉物镜和镜筒透镜组成.物镜由光焦度较大的正光组和光焦度较小的负光组组成.轮廓仪的放大率为-10,数值孔径为0.3,工作距5mm,视场0.64×0.48mm2,中心遮拦0.129.相移器为电容式闭环控制的压电陶瓷传感器.通过6幅光纤连接器端面的干涉图,经6步相移法得到其表面形貌.实验结果表明,Mirau干涉轮廓仪的横向分辨率为0.875μm,垂直方向的测量范围为5.3μm,重复测量精度为1.7nm.Based on the Mirau interference configuration, a Mirau phase-shifting interferometer is developed to inspect microsurface topography. Kohler illumination is adopted to illuminate the sample uniformly. The interference image system is the long working-distance and infinity-tube microscope prototype, which consists of a Mirau interference objective and a tube lens. The objective consists of a larger positive power lens and a smaller negative power lens. The parameters of the interferometer are as follows:numerical aperture is 0.3, magnification -10, working distance 5 mm, field-of-view 0.64×0.48 mm2, and central obscuration 0.129. The phase shifter is the capacitive closed-loop piezoelectric transducer (PZT). The surface topography of optic fiber connector is obtained with six interferograms by six-step phase-shifting algorithm. The result shows that the lateral resolution is 0.875 μm, the vertical measurement range is 5.3 μm and the vertical repeatability is 1.7 nm of the Mirau interferometer.

关 键 词：Mirau干涉 相移干涉轮廓仪 Mirau干涉物镜 光纤连接器 压电陶瓷传感器 

分 类 号：TH74[机械工程—光学工程]