纳米级电容测微系统的研究  

A research of the technology of nano-meter capacitive measurement

作　　者：史庆伟[1] 周涛[1] 郑义忠[1] 张国雄[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《现代仪器》2005年第3期48-50,53,共4页Modern Instruments

摘　　要：本文首先介绍非接触式高精度电容测微仪的基本工作原理,进而详细论述纳米级电容测微技术中所涉及到的非线性误差、环境噪声等的关键技术问题,对典型驱动电缆方案作比较。根据原理模型,给出仪器的主要结构。对仪器自身产生的各种误差进行详细的分析,并提出相应的消除或修正方法。换用不同有效直径的传感器可以使仪器分辨率最小达到0 1nm ,测量范围±2～±5 0 μm ,满量程非线性度优于0 5 %。该仪器可广泛应用于通过串口、USB口通信的高精度的动。In this paper the principle of non contact nano meter capacitive measurement instrument is introduced Then the key technology for reducing or eliminating the nonlinear errors and some ambient miose, such as equipotential ring, driving electric cable, are proposed in detailed, and several programs of driving electric cable are compared especially According to the principle model, the modular design on the modularized circuit of the micrometer is given Then detailed analyses on elimination errors created by the capacitance measurement is given, at the same time various amendments or slaking methods are proposed Changing the sensors with different effective diameter can result in the best resolution of 0 1nm, with an measurement range from ±2μm to ±50μm, its linearity is better than 0 5% With the USB or COM communication the instrument can be widely applied in the high-resolution static or dynamic micro displacement-measurement and the nano-positioning

关 键 词：纳米级 测微系统 电容测微仪 非线性误差 微位移测量 工作原理 非接触式 测微技术 关键技术 环境噪声 驱动电缆 主要结构 修正方法 有效直径 测量范围 非线性度 USB口 纳米定位 高精度 仪器 分辨率 传感器 最小 串口 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TQ174.758[自动化与计算机技术—控制科学与工程]