表面波方法表征纳米多孔SiO_2薄膜机械特性的对准技术  

Alignment Technique Used in the SAW Method for Characterizing the Mechanical Property of the Nano-Porous SiO_2

作　　者：肖夏[1] 张鑫慧[1] 姚素英[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《纳米技术与精密工程》2005年第2期122-125,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(60406003);教育部留学归国人员科研启动基金.

摘　　要：超声表面波方法表征薄膜材料机械特性的过程是将理论计算的色散曲线与实验所得的色散曲线进行拟合,获得所测薄膜样品的杨氏模量值.因此,实验信号的有效性是获得准确结果的最重要因素.双端压电传感探头的设计确保了实验测试条件与理论计算模型的一致性,从而进一步增加了测定结果的准确性.应用此技术对纳米多孔SiO2薄膜的机械性能进行了测定,当其膜密度为1.15g/cm3时,拟合出的杨氏模量值为1.5GPa.分析结果还表明影响拟合结果准确性的实验因素主要是压头的位置与平头表面波的角度偏差.The surface acoustic waves(SAWs)technique acquires Young’s modulus of the thin film by fitting the dispersive SAW velocity obtained from the theoretical computation with that from the experiment.To ensure the correct detection of the SAWs, a piezoelectric twin-transducer was introduced as the SAWs detector to improve the precise alignment of the detector.The mechanical property of a nano-porous SiO_2 thin film was determined by this technique.The Young’modulus is determined as 1.5 GPa when the measured SiO_2 film has a density of 1.15 g/cm^3.The analysis indicates that the experimental factor of depressing the fitting accuracy is the angle misalignment of the transducer with the saggital motion SAWs.

关 键 词：SIO2薄膜 机械特性 纳米多孔 对准技术 表征 理论计算模型 色散曲线 超声表面波 薄膜材料 薄膜样品 测试条件 传感探头 机械性能 测定结果 角度偏差 分析结果 准确性 实验 拟合 一致性 量值 

分 类 号：TB383[一般工业技术—材料科学与工程]