桥式硅压阻器件在气压测量中的应用  

Application of silicon bridge piezoresistive element in air pressure measurment

作　　者：祝宇虹[1] 纪军红[1] 孙宁[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,黑龙江哈尔滨150080

出　　处：《传感器技术》2005年第5期74-76,共3页Journal of Transducer Technology

基　　金：国家高技术研究发展计划资助项目(2003AA421050)

摘　　要：介绍了桥式硅压阻器件的工作原理、性能指标和工作特点。通过设计实例说明了压阻器件的应用方法。试验证明:这种气压器件精度高、测量范围宽、体积和普通IC芯片相同、价格低,可以广泛应用在各种气压测量和控制领域。The principle,specifications and performance of the silicon piezoresistive element are presented.An example is provided to demonstrate how to use the element.The element has high accuracy and wide measurement range.Its dimension is roughly same with ordinary IC chip with two column pins,and the price is low.The silicon piezoresistive element can be widely used in air pressure measuring and control applications.

关 键 词：压阻效应 桥式压阻器件 气压测量 

分 类 号：TH7[机械工程—仪器科学与技术]