扩散硅压力传感器热灵敏度漂移补偿方法的研究  

Research on Compensating Method for Thermal Sensitivity Drift of Silicon Pressure Transducer

作　　者：张莉丽[1] 戎华[2] 刘仁 

机构地区：[1]西安交通大学,西安市710049 [2]南京师范大学,南京市210097 [3]兰州炼油化工仪表厂,兰州市730060

出　　处：《仪器仪表标准化与计量》2005年第3期16-18,共3页Instrument Standardization & Metrology

摘　　要：分析了恒压源供电和恒流源供电两种情况下扩散硅压力传感器的灵敏度随温度变化的关系式,提出了用软件补偿其热灵敏度漂移的计算方法,并且就恒流源供电且灵敏度温度系数大于零的情况,推出了用并联电阻补偿热灵敏度漂移时,并联电阻阻值的计算公式,模拟结果表明补偿效果非常显著。The relations between sensitivity of pressure transducer and temperature were analyzed. A compensating method by using compensating software to compensate the thermal sensitivity drift was suggested. To transducer stimulated by current source and its temperature coefficient of sensitivity is positive, and used a parallel resistor to compensate its thermal sensitivity drift, an equation to calculate the compensating resistor was obtained. The simulating result indicated compensating effect was remarkable.

关 键 词：扩散硅压力传感器 热灵敏度漂移 补偿方法 温度变化 计算方法 软件补偿 温度系数 电阻补偿 计算公式 电阻阻值 补偿效果 模拟结果 恒流源 关系式 供电 恒压源 并联 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP212.1[自动化与计算机技术—控制科学与工程]